问题描述：
英语翻译
For pre-vacuum generation the pre-vacuum pump is connected with the deposition chamber via corner valve = 1-16Y1 / VV3 (bypass oil- diffusion pumps),with the oil diffusion pump =1-3A1 / VP3 via corner valve = 1-16Y1/VV3,and with oil diffusions pump =1-4A1 / VP4 via corner valve =1- 17Y1/VV5.
For pre-vacuum generation the pre-vacuum pump is connected with the deposition chamber via corner valve = 1-16Y1 / VV3 (bypass oil- diffusion pumps),with the oil diffusion pump =1-3A1 / VP3 via corner valve = 1-16Y1/VV3,and with oil diffusions pump =1-4A1 / VP4 via corner valve =1- 17Y1/VV5.
问题解答：
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